Studies on interface of Cu/Al and Al/SiO2/Si

Procedia Engineering 2016 Vol. 141

Studies on interface of Cu/Al and Al/SiO2/Si

Irie, Yoshihiro, Tanaka, Hiromi, Kinoshita, Kentaro, Kishida, Satoru
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Volume:
141
Year:
2016
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2015.09.220
File:
PDF, 657 KB
english, 2016
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