Preparation of photoresist polymer by a photoreactive monomer containing N,N-diethyldithiocarbamate group
Keiji Yamashita, Akio Nakano, Kazuichi TsudaVolume:
35
Year:
1988
Language:
english
Pages:
9
DOI:
10.1002/app.1988.070350213
File:
PDF, 455 KB
english, 1988