Preparation of photoresist polymer by a photoreactive...

Preparation of photoresist polymer by a photoreactive monomer containing N,N-diethyldithiocarbamate group

Keiji Yamashita, Akio Nakano, Kazuichi Tsuda
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Volume:
35
Year:
1988
Language:
english
Pages:
9
DOI:
10.1002/app.1988.070350213
File:
PDF, 455 KB
english, 1988
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