Study of the structure of silica film by infrared spectroscopy and electron diffraction analyses
Tomonari Morioka, Seiji Kimura, Noritoshi Tsuda, Chihiro Kaito, Yoshio Saito, Chiyoe KoikeVolume:
299
Year:
1998
Language:
english
Pages:
5
DOI:
10.1046/j.1365-8711.1998.01743.x
File:
PDF, 533 KB
english, 1998