Solvent penetration and photoresist dissolution: A...

Solvent penetration and photoresist dissolution: A fluorescence quenching and interferometry study

William Limm, Deirdre Stanton, Gerald P. Dimnik, Mitchell A. Winnik, Barton A. Smith
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Volume:
35
Year:
1988
Language:
english
Pages:
18
DOI:
10.1002/app.1988.070350811
File:
PDF, 849 KB
english, 1988
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