Solvent penetration and photoresist dissolution: A fluorescence quenching and interferometry study
William Limm, Deirdre Stanton, Gerald P. Dimnik, Mitchell A. Winnik, Barton A. SmithVolume:
35
Year:
1988
Language:
english
Pages:
18
DOI:
10.1002/app.1988.070350811
File:
PDF, 849 KB
english, 1988