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[IEEE 2014 International Conference on Planarization/CMP Technology (ICPT) - Kobe, Japan (2014.11.19-2014.11.21)] Proceedings of International Conference on Planarization/CMP Technology 2014 - A study on swing-arm conditioning for enhancing pad lifetime in CMP
Lee, Hyunseop, Lee, Dasol, Jeong, Haedo, Lee, SangjikYear:
2014
Language:
english
DOI:
10.1109/icpt.2014.7017317
File:
PDF, 388 KB
english, 2014