[IEEE 6th International Conference on Solid-State and IC...

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[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - The effect of Pd addition on silicide formation for Ni/Pd bilayers on silicon

Xin-Ping Qu,, Detavernier, C., Meirhaeghe, R.L., Guo-Ping Ru,, Bing-Zong Li,
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Volume:
1
Year:
2001
Language:
english
DOI:
10.1109/icsict.2001.981527
File:
PDF, 249 KB
english, 2001
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