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[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - A comparison of shallow implantation between B, BF/sub 2/ and B/sub 10/H/sub 14/ by molecular dynamics simulation
Webb, R., Kerford, M., Emerson, N., Smith, R., Harrison, M., Foad, M.Volume:
2
Year:
1998
Language:
english
DOI:
10.1109/iit.1998.813779
File:
PDF, 284 KB
english, 1998