[IEEE ISCAS 2003. International Symposium on Circuits and...

[IEEE ISCAS 2003. International Symposium on Circuits and Systems - Bangkok, Thailand (25-28 May 2003)] Proceedings of the 2003 International Symposium on Circuits and Systems, 2003. ISCAS '03. - Electrostatical coupling-spring for micro-mechanical filtering applications

Galayko, D., Kaiser, A., Buchaillot, L., Collard, D., Combi, C.

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Volume:

Year:

2003

Language:

english

DOI:

10.1109/iscas.2003.1205073

File:

PDF, 293 KB

english, 2003

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