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[Inst. Electr. Eng. Japan 1998 International Symposium on Electrical Insulating Materials - Toyohashi, Japan (27-30 Sept. 1998)] Proceedings of 1998 International Symposium on Electrical Insulating Materials. 1998 Asian International Conference on Dielectrics and Electrical Insulation. 30th Symposium on Electrical Insulating Materials (IEEE Cat. No.98TH8286) - CF/sub 4/-RIE development characteristics of columnar-SeGe ion resists with focused-ion-beam lithography
Hyun-Yong Lee,, Seung-Woo Paek,, Young-Jong Lee,, Hong-Bay Chung,Year:
1998
Language:
english
DOI:
10.1109/iseim.1998.741708
File:
PDF, 493 KB
english, 1998