Optical emission spectroscopy of the plasma during sputter...

IEEE Transactions on Appiled Superconductivity 2003 / 06 Vol. 13; Iss. 2

Optical emission spectroscopy of the plasma during sputter deposition of YBCO films for microwave applications

Tsaneva, V.N., Nurgaliev, T.C., Donchev, T.I., Vickers, M.E., Durrell, J.H., Purnell, A., Cohen, L.F., Barber, Z.H.
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Volume:
13
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/tasc.2003.812002
Date:
June, 2003
File:
PDF, 412 KB
english, 2003
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