Wafer Map Defect Detection and Recognition Using Joint Local and Nonlocal Linear Discriminant Analysis
Yu, Jianbo, Lu, XiaoleiVolume:
29
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2015.2497264
Date:
February, 2016
File:
PDF, 1.63 MB
english, 2016