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[IEEE Conference on Electrical Insulation and Dielectric Phenomena - Austin, TX, USA (17-20 Oct. 1999)] 1999 Annual Report Conference on Electrical Insulation and Dielectric Phenomena (Cat. No.99CH36319) - Effect of annealing on dielectric dispersion of tantalum oxide films prepared by RF sputtering
Itoh, E., Maki, K., Miyairi, K.Year:
1999
Language:
english
DOI:
10.1109/ceidp.1999.804593
File:
PDF, 284 KB
english, 1999