[IEEE 2014 IEEE Sensors - Valencia, Spain (2014.11.2-2014.11.5)] IEEE SENSORS 2014 Proceedings - Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator
Gando, Ryunosuke, Nakamura, Naofumi., Hayashi, Yumi, Ono, Daiki., Masunishi, Kei, Tomizawa, Yasushi, Yamazaki, Hiroaki, Ikehashi, Tamio, Sugizaki, Yoshiaki, Shibata, HidekiYear:
2014
Language:
english
DOI:
10.1109/icsens.2014.6985164
File:
PDF, 1.37 MB
english, 2014