[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - In-line control of nitrogen implanted silicon for advanced multi-gate oxide application
Tings Wang,, Chang, C.-I., Wang, J.S., Cheng, T., Nan-Cyi Wu,Volume:
1
Year:
2004
Language:
english
DOI:
10.1109/icsict.2004.1435037
File:
PDF, 714 KB
english, 2004