[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - An improved electrostaiically-driven micro torsion mirror fabricated by silicon micromachining for optical switching devices
Qinghua Chen,, Wengang Wu,, Dachao Li,, Guizhen Yan,, Yilong Hao,Volume:
3
Year:
2004
Language:
english
DOI:
10.1109/icsict.2004.1435211
File:
PDF, 593 KB
english, 2004