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[IEEE 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) - Grenoble, France (2015.5.18-2015.5.21)] 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) - Carbon nanotubes TSV grown on an electrically conductive ZrN support layer
Vollebregt, Sten, Banerjee, Sourish, Tichelaar, Frans D., Ishihara, RyoichiYear:
2015
Language:
english
DOI:
10.1109/iitc-mam.2015.7325667
File:
PDF, 876 KB
english, 2015