[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Actuated polysilicon micromirrors for raster-scanning displays
Meng-Hsiung Kiang,, Francis, D.A., Chang-Hasnain, C.J., Solgard, O., Lau, K.Y., Muller, R.S.Volume:
1
Year:
1997
Language:
english
DOI:
10.1109/sensor.1997.613649
File:
PDF, 407 KB
english, 1997