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Chemical Vapor Deposition of Ni–C Films from Bis-(Ethylcyclopentadienyl) Nickel
Alexandrov, S. E., Protopopova, V. S.Volume:
11
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2011.5058
Date:
September, 2011
File:
PDF, 4.20 MB
english, 2011