[IEEE ESSDERC 2014 - 44th European Solid State Device Research Conference - Venice Lido, Italy (2014.9.22-2014.9.26)] 2014 44th European Solid State Device Research Conference (ESSDERC) - Monte Carlo modeling of the extraction of roughness parameters at nanometer scale by Critical Dimension Scanning Electron Microscopy
Ciappa, M., Ilgunsatiroglu, E., Illarionov, A. Yu., Filosomi, F., Santini, C.Year:
2014
Language:
english
DOI:
10.1109/essderc.2014.6948834
File:
PDF, 3.86 MB
english, 2014