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[IEEE 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings - Santa Clara, CA, USA (11-13 Oct. 1999)] 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314) - Operator error prevention system of semiconductor foundry manufacturing
Chien-Chung Huang,, Hsu, S.H., Gu-Lung Lin,, Shiao-Jong Hu,, Hsiang-Yin Shen,, Hsiao-Lung Chu,, Wen-Yao Chen,Year:
1999
Language:
english
DOI:
10.1109/issm.1999.808791
File:
PDF, 212 KB
english, 1999