[IEEE 2015 IEEE 58th International Midwest Symposium on Circuits and Systems (MWSCAS) - Fort Collins, CO, USA (2015.8.2-2015.8.5)] 2015 IEEE 58th International Midwest Symposium on Circuits and Systems (MWSCAS) - A design flow to quantify and limit multiple patterning effects
Harb, Mohammed, Dessouky, MohamedYear:
2015
Language:
english
DOI:
10.1109/mwscas.2015.7282106
File:
PDF, 710 KB
english, 2015