SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2014 - Zvenigorod, Russian Federation (Monday 6 October 2014)] International Conference on Micro- and Nano-Electronics 2014 - Formation of fast neutral beams and their using for selective etching
Orlikovsky, Alexander A., Maishev, Yu. P., Shevchuk, S. L., Kudrya, V. P.Volume:
9440
Year:
2014
Language:
english
DOI:
10.1117/12.2180434
File:
PDF, 2.13 MB
english, 2014