Synthesis and evaluation of methyl methacrylate copolymers and terpolymers as electron-beam resists. I. Poly(methyl methacrylate–methacrylic acid–methacryloyl chloride)
Ivan Gitsov, Nikolina A. MadjarovaVolume:
41
Year:
1990
Language:
english
Pages:
6
DOI:
10.1002/app.1990.070411117
File:
PDF, 317 KB
english, 1990