[IEEE 2015 27th International Conference on Microelectronics (ICM) - Casablanca, Morocco (2015.12.20-2015.12.23)] 2015 27th International Conference on Microelectronics (ICM) - Accelerated lifetime tests and failure analysis of an electro-thermally actuated MEMS valve
Skima, H., Medjaher, K., Varnier, C., Zerhouni, N., Dedu, E., Bourgeois, J.Year:
2015
Language:
english
DOI:
10.1109/ICM.2015.7437991
File:
PDF, 1.07 MB
english, 2015