[IEEE 2014 51st ACM/EDAC/IEEE Design Automation Conference (DAC) - San Francisco, CA, USA (2014.6.1-2014.6.5)] 2014 51st ACM/EDAC/IEEE Design Automation Conference (DAC) - Simultaneous EUV flare variation minimization and CMP control with coupling-aware dummification
Chi-Yuan Liu,, Chiang, Hui-Ju Katherine, Chang, Yao-Wen, Jiang, Jie-Hong R.Year:
2014
Language:
english
DOI:
10.1109/dac.2014.6881381
File:
PDF, 1.04 MB
english, 2014