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[IEEE 1997 IEEE International Conference on Microelectronic Test Structures Proceedings - Monterey, CA, USA (17-20 March 1997)] 1997 IEEE International Conference on Microelectronic Test Structures Proceedings - Reference-length shortening by Kelvin voltage taps in linewidth test structures replicated in monocrystalline silicon films
Lee, W.E., Guthrie, W.F., Cresswell, M.W., Allen, R.A., Sniegowski, J.J., Linholm, L.W.Year:
1997
Language:
english
DOI:
10.1109/icmts.1997.589322
File:
PDF, 559 KB
english, 1997