[IEEE Proceedings of the 2002 14th International Conference on Ion Implantation Technology - Taos, New Mexico, USA (2002.9.22-2002.9.27)] Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on - Charging effects on medium current implanter on CMOS and mixed signal IC's
Gandy, T.H., Sargunas, V., Singh, A., Taduri, S., Thiefain, P., Ameen, M.S., Rathmell, R.Year:
2002
Language:
english
DOI:
10.1109/iit.2002.1257998
File:
PDF, 614 KB
english, 2002