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[IEEE 2014 Microelectronic Systems Symposium (MESS) - Vienna, Austria (2014.5.8-2014.5.9)] 2014 Microelectronic Systems Symposium (MESS) - Concept study on an electrodynamically driven and read-out torsional oscillator
Heinisch, Martin, Voglhuber-Brunnmaier, Thomas, Reichel, Erwin K., Clara, Stefan, Abdallah, Ali, Jakoby, BernhardYear:
2014
Language:
english
DOI:
10.1109/mess.2014.7010256
File:
PDF, 1.13 MB
english, 2014