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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Stability of wafer level vacuum encapsulated single-crystal silicon resonators
Kaajakari, V., Kiihamaki, J., Oja, A., Sepp, H., Pietikainen, S., Kokkala, V., Kuisma, H.Volume:
1
Year:
2005
Language:
english
DOI:
10.1109/sensor.2005.1496567
File:
PDF, 728 KB
english, 2005