Coherent X-Ray Diffraction Imaging and Characterization of Strain in Silicon-on-Insulator Nanostructures
Xiong, Gang, Moutanabbir, Oussama, Reiche, Manfred, Harder, Ross, Robinson, IanVolume:
26
Language:
english
Journal:
Advanced Materials
DOI:
10.1002/adma.201304511
Date:
December, 2014
File:
PDF, 1.81 MB
english, 2014