Numerical Modeling of the Droplet Vaporization for Design...

Chemical Vapor Deposition 2015 / 12 Vol. 21; Iss. 10-11-12

Numerical Modeling of the Droplet Vaporization for Design and Operation of Liquid-pulsed CVD

Boichot, Raphaël, Krumdieck, Susan
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Volume:
21
Language:
english
Journal:
Chemical Vapor Deposition
DOI:
10.1002/cvde.201571015
Date:
December, 2015
File:
PDF, 430 KB
english, 2015
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