Effects of sputtering and assisting ions on the orientation...

Materials Letters 2016 / 05 Vol. 171

Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target

Zhang, Linao, Tong, Shuo, Liu, Haonan, Li, Yinglan, Wang, Zhi
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Volume:
171
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2016.02.100
Date:
May, 2016
File:
PDF, 1.22 MB
english, 2016
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