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Precision Engineering 2016 / 3

Design and Control of a Cascaded Piezoelectric Actuated Two-Degrees-of-Freedom Positioning Compliant Stage

Lee, Jer-Wei, Li, Yu-Ching, Chen, Kuo-Shen, Liu, Yun-Hui
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Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2016.03.015
Date:
March, 2016
File:
PDF, 1.66 MB
english, 2016
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