The mechanism of metal oxide deposition from ALD inside non-reactive polymer matrices: Effects of polymer crystallinity and temperature
Obuchovsky, Stas, Frankenstein, Hadar, Vinokur, Jane, Hailey, Anna K, Loo, Yueh-Lin, Frey, Gitti L.Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/acs.chemmater.6b00159
Date:
March, 2016
File:
PDF, 1.04 MB
english, 2016