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Power consumption effect on the microcrystalline silicon deposition process: a comparison between model and experimental results
Lyka, B, Amanatides, E, Mataras, D, Rapakoulias, D EVolume:
10
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/10/1/049
Date:
January, 2005
File:
PDF, 106 KB
english, 2005