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[IEEE 2010 20th International Crimean Conference "Microwave & Telecommunication Technology" (CriMiCo 2010) - Sevastopol (2010.9.13-2010.9.17)] 2010 20th International Crimean Conference "Microwave & Telecommunication Technology" - Features of formation of active areas of n-p-n-transistors for submicronic integrated microcircuits
Belous, V A, Brinkevich, D I, Prosolovich, V S, Chernyi, V V, Yankovski, Yu NYear:
2010
Language:
english
DOI:
10.1109/crmico.2010.5632984
File:
PDF, 2.08 MB
english, 2010