[IEEE 2010 20th International Crimean Conference "Microwave & Telecommunication Technology" (CriMiCo 2010) - Sevastopol (2010.9.13-2010.9.17)] 2010 20th International Crimean Conference "Microwave & Telecommunication Technology" - Features of formation of active areas of n-p-n-transistors for submicronic integrated microcircuits

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