[IEEE 2015 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2015.3.15-2015.3.16)] 2015 China Semiconductor Technology International Conference - Species selection of pre-amorphous implantation in Nickle Silicide process
Yuming, Qiu, Deqin, Yu, Wenjie, Cao, Tianjin, Xiao, Zhibin, He, Wei, Liu, Xubin, Jing, Jingxun, Fang, Pang, AlbertYear:
2015
Language:
english
DOI:
10.1109/cstic.2015.7153336
File:
PDF, 648 KB
english, 2015