[IEEE IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society - San Jose, CA, USA (29 Nov.-3 Dec. 1999)] IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society (Cat. No.99CH37029) - Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks

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