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[IEEE IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society - San Jose, CA, USA (29 Nov.-3 Dec. 1999)] IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society (Cat. No.99CH37029) - Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
Weng Khuen Ho,, Tay, A., Schaper, C.D.Volume:
1
Year:
1999
Language:
english
DOI:
10.1109/iecon.1999.822162
File:
PDF, 558 KB
english, 1999