[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - NMOS source-drain extension ion implantation into heated substrates
Pipes, Leonard C., McGill, Lisa, Jahagirdar, AnantYear:
2014
Language:
english
DOI:
10.1109/iit.2014.6939768
File:
PDF, 600 KB
english, 2014