![](/img/cover-not-exists.png)
[IEEE Proceedings of the 1999 Particle Accelerator Conference (Cat. No.99CH36366) - New York, NY, USA (1999.03.27-1999.04.2)] Proceedings of the 1999 Particle Accelerator Conference (Cat. No.99CH36366) - Multicusp ion source for ion projection lithography
Lee, Y., Leung, K.N., Williams, M.D., Bruenger, W.H., Fallmann, W., Loschner, H., Stengl, G.Year:
1999
Language:
english
DOI:
10.1109/pac.1999.792782
File:
PDF, 280 KB
english, 1999