[IEEE Proceedings of the 1999 Particle Accelerator...

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[IEEE Proceedings of the 1999 Particle Accelerator Conference (Cat. No.99CH36366) - New York, NY, USA (1999.03.27-1999.04.2)] Proceedings of the 1999 Particle Accelerator Conference (Cat. No.99CH36366) - Multicusp ion source for ion projection lithography

Lee, Y., Leung, K.N., Williams, M.D., Bruenger, W.H., Fallmann, W., Loschner, H., Stengl, G.
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Year:
1999
Language:
english
DOI:
10.1109/pac.1999.792782
File:
PDF, 280 KB
english, 1999
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