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[IEEE 2004 IEEE International Reliability Physics Symposium. - Phoenix, AZ, USA (25-29 April 2004)] 2004 IEEE International Reliability Physics Symposium. Proceedings - Effects of low k film properties on electromigration performance
Wei Lu,, Yeow Kheng Lim,, See, A., Tae Jong Lee,, Liang Choo Hsia,, Hander, J., Haiying Fu,, Ling Soon Wong,, Fong Pin Fen,Year:
2004
Language:
english
DOI:
10.1109/relphy.2004.1315419
File:
PDF, 189 KB
english, 2004