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[IEEE 2015 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - Washington DC, USA (2015.9.9-2015.9.11)] 2015 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - Lithography process model building using locally linear embedding
Kumar, Pardeep, Rosenbluth, Alan E., Srinivasan, Babji, Viswanathan, Ramya, Mohapatra, Nihar R.Year:
2015
Language:
english
DOI:
10.1109/sispad.2015.7292348
File:
PDF, 871 KB
english, 2015