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Study on organosilicon positive resist. I. Syntheses and characterization of silsesquioxane, siloxane, and silmethylene polymers with phenolic hydroxy groups
Hisashi Sugiyama, Takashi Inoue, Kazuo NateVolume:
44
Year:
1992
Language:
english
Pages:
10
DOI:
10.1002/app.1992.070440909
File:
PDF, 733 KB
english, 1992