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Function-oriented characterisation for surface metrology
Weckenmann, A., Tan, Özgür, Hartmann, WitoVolume:
7
Year:
2011
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/ijnm.2011.043688
File:
PDF, 1.87 MB
english, 2011