Catalyst Self-Assembly for Scalable Patterning of Sub 10 nm...

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ACS Applied Materials & Interfaces 2016 / 03

Catalyst Self-Assembly for Scalable Patterning of Sub 10 nm Ultrahigh Aspect Ratio Nanopores in Silicon

Smith, Brendan D., Patil, Jatin J., Ferralis, Nicola, Grossman, Jeffrey C.
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.6b01927
Date:
March, 2016
File:
PDF, 9.94 MB
english, 2016
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