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[IEEE 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2015.5.3-2015.5.6)] 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Productivity challenges in PVD processing in 300mm pilot lines for power semiconductors
Rastogi, A., Morin, N., Jones, C., Burgess, S., Trowell, R., Widdicks, C., Moncrieff, I., Ehmann, M., Schmidbauer, S.Year:
2015
Language:
english
DOI:
10.1109/asmc.2015.7164471
File:
PDF, 837 KB
english, 2015