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[IEEE 2015 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2015.3.15-2015.3.16)] 2015 China Semiconductor Technology International Conference - Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
Zhang, Hao-Xiang, Zhang, Chun-Min, Wang, Peng-FeiYear:
2015
Language:
english
DOI:
10.1109/cstic.2015.7153392
File:
PDF, 443 KB
english, 2015