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[IEEE 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Montpellier, France (2015.4.27-2015.4.30)] 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Stress controlled CMUT fabrication based on a CMOS compatible sacrificial release process
Elsaesser, Linus, Friedrichs, Martin, Klemm, Markus, Unamuno, AnartzYear:
2015
Language:
english
DOI:
10.1109/dtip.2015.7160992
File:
PDF, 6.24 MB
english, 2015