[IEEE 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum (FCS) - Denver, CO, USA (2015.4.12-2015.4.16)] 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum - Manufacturability of highly doped aluminum nitride films
Mishin, Sergey, Oshmyansky, YuryYear:
2015
Language:
english
DOI:
10.1109/fcs.2015.7138957
File:
PDF, 1.01 MB
english, 2015