[IEEE The 16th International Conference on Microelectronics, 2004. ICM 2004. - Tunis, Tunisia (Dec. 6-8, 2004)] Proceedings. The 16th International Conference on Microelectronics, 2004. ICM 2004. - Effect of nitrogen on the diffusion and the activation of the boron implanted in polysilicon thin layers
Mahamdi, R., Mansour, F., Temple-Boyer, P., Scheid, F.Year:
2004
Language:
english
DOI:
10.1109/icm.2004.1434728
File:
PDF, 522 KB
english, 2004